fig9

Recent progress in pressure and temperature tactile sensors: principle, classification, integration and outlook

Figure 9. (A) Fabrication process of a temperature sensitive piezoelectric device; and (B) pressure sensitivity and (C) linear temperature response of the bimodal sensor after three months with the inset showing temperature sensitivity. This figure is quoted with permission from Zhu et al.[45].

Soft Science
ISSN 2769-5441 (Online)
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