fig6

Figure 6. Tactile sensors integrated with transistors. (A) Schematic of the composition and mechanism of the tactile sensor integrated with a field-effect transistor. (B) The image and results of the flexible performance measurement for the system in (A). (A, B) Reproduced with permission from Ref.^[92]. Copyright^© 2020. Elsevier. (C) Photograph and the drain current response to the pressure of the sensor array integrated with a field-effect transistor. Reproduced with permission from Ref.^[52]. Copyright^© 2014. Springer Nature. (D) Schematic of the thin-film transistor and independent detection capability of compressive and shear stress using the three-dimensional PDMS pillar array. Reproduced with permission from Ref.^[93]. Copyright^© 2020. OAE Publishing Inc. (E) Illustration of the sensor layer and 3D schematics of MoS₂ transistor. Reproduced with permission from Ref.^[94]. Copyright^© 2021. Elsevier. (F) Working principle and equivalent circuit of tactile sensor integrated with a transistor. Reproduced with permission from Ref.^[96]. Copyright^© 2020. OAE Publishing Inc.